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Chapter 27: Semiconductor Fabrication Facilities
Section FC 2701: General
Section FC 2702: Definitions
Section FC 2703: General Safety Provisions
2703.1 Emergency control station.
2703.1.1 Location.
2703.1.2 Staffing.
2703.1.3 Signals.
2703.2 Devices, equipment and systems.
2703.2.1 Additional regulations for HPM supply piping and tubing.
2703.3 Design and installation requirements.
2703.3.1 Fabrication areas.
2703.3.2 Pass-throughs in exit access corridors.
2703.3.3 Liquid storage rooms.
2703.3.4 HPM rooms.
2703.3.5 Gas cabinets.
2703.3.6 Exhausted enclosures.
2703.3.7 Gas rooms.
2703.3.8 Service corridors.
2703.3.9 Cabinets containing pyrophoric liquids or water-reactive Class 3 liquids.
2703.4 Emergency plan.
2703.5 Maintenance of devices, equipment, systems and processes.
2703.6 Reserved.
2703.7 Electrical wiring and equipment.
2703.7.1 Fabrication areas.
2703.7.2 Workstations.
2703.7.3 Hazardous production material (HPM) rooms, gas rooms and liquid storage rooms.
2703.8 Reserved.
2703.9 Reserved.
2703.10 Sprinkler system.
2703.10.1 Workstations and tools.
2703.10.1.1 Combustible workstations.
2703.10.1.2 Combustible tools.
2703.10.2 Gas cabinets and exhausted enclosures.
2703.10.3 Pass-throughs in exit access corridors.
2703.10.4 Exhaust ducts for HPM.
2703.10.4.1 Metallic and noncombustible nonmetallic exhaust ducts.
2703.10.4.2 Combustible nonmetallic exhaust ducts.
2703.10.4.3 Exhaust connections and plenums of combustible workstations.
2703.10.4.4 Exhaust duct sprinkler system requirements.
2703.10.4.4.1 Sprinkler head locations.
2703.10.4.4.2 Control valve.
2703.10.4.4.3 Drainage.
2703.10.4.4.4 Corrosive atmospheres.
2703.10.4.4.5 Maintenance and inspection.
2703.10.5 Sprinkler alarms and supervision.
2703.11 Manual fire alarm system.
2703.12 Emergency alarm system.
2703.12.1 Where required.
2703.12.1.1 Service corridors.
2703.12.1.2 Exit access corridors and exit enclosures.
2703.12.1.3 Liquid storage rooms, HPM rooms and gas rooms.
2703.12.2 Alarm-initiating devices.
2703.12.3 Alarm signals.
2703.13 Continuous gas detection systems.
2703.14 Exhaust ventilation systems for HPM.
2703.14.1 Where required.
2703.14.2 Penetrations.
2703.14.3 Treatment systems.
2703.15 Emergency power system.
2703.15.1 Required electrical systems.
2703.16 Sub-atmospheric pressure gas systems.
Section FC 2704: Storage
Section FC 2705: Handling and Use
Chapter 28: Lumber Yards and Wood Waste Materials
Chapter 29: Manufacture of Organic Coatings
Chapter 30: Industrial Furnaces
Chapter 31: Tents and Other Membrane Structures
Chapter 32: High-Piled Combustible Storage
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Chapter 64: Pyrophoric Materials
Chapter 65: Pyroxylin Plastics
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2703.1.3 Signals.
The emergency control station shall monitor signals from emergency equipment and alarm and detection systems, including the following systems, whether required by this code or the construction codes or voluntarily installed:
   1.   Sprinkler system alarm and monitoring systems.
   2.   Manual fire alarm systems.
   3.   Emergency alarm systems.
   4.   Continuous-gas detection systems.
   5.   Smoke detection systems.
   6.   Emergency power systems.
   7.   Automatic detection and alarm systems for pyrophoric liquids and Class 3 water-reactive liquids required by FC 2705.2.3.4.
   8.   Exhaust ventilation flow alarm devices for pyrophoric liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems required by FC 2705.2.3.4.
2703.2 Devices, equipment and systems.
Devices, equipment and systems including, containers, piping, tubing, valves and fittings shall comply with the requirements of this section, FC 5003.2, and other applicable provisions of this code, and the construction codes, including the Building Code and the Mechanical Code.
2703.2.1 Additional regulations for HPM supply piping and tubing.
The requirements set forth in FC 5003.2.2.2 shall apply to supply piping and tubing for HPM gases and liquids. Supply piping and tubing for HPM gases and liquids having a health-hazard ranking of 3 or 4 shall be welded throughout, except for connections located within a ventilated enclosure if the material is a gas, or an approved method of drainage or containment is provided for connections if the material is a liquid.
2703.3 Design and installation requirements.
Semiconductor fabrication facilities shall be designed and installed in accordance with FC 2703.3.1 through 2703.3.9.
2703.3.1 Fabrication areas.
Design, installation and location of fabrication areas shall comply with the requirements of the construction codes, including the Building Code.
2703.3.2 Pass-throughs in exit access corridors.
Pass-throughs in exit access corridors shall be constructed in accordance with the construction codes, including the Building Code.

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