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Exhausted enclosures and gas cabinets for the indoor storage of silane gas in amounts exceeding the maximum allowable quantities per control area shall comply with this section.
1. Exhausted enclosures and gas cabinets shall be in accordance with Section 18-28-502.7.2.
2. The velocity of ventilation across unwelded fittings and connections on the piping system shall not be less than 200 feet per minute (1.02 m/s).
3. The average velocity at the face of the access ports or windows in the gas cabinet shall not be less than 200 feet per minute (1.02 m/s) with a minimum velocity of 150 feet per minute (0.76 m/s) at any point at the access port or window.
Exhaust ventilation systems shall be provided in the following locations in accordance with the requirements of this section.
1. Fabrication areas. Exhaust ventilation for fabrication areas shall comply with requirements for Hazardous Use Units and Chicago Fire Code. Additional manual control switches shall be provided at exits from the fabrication area.
2. Workstations. A ventilation system shall be provided to capture and exhaust fumes and vapors at workstations.
3. Liquid storage rooms. Exhaust ventilation for liquid storage rooms shall comply with Section 18-28-502.7.1.1 and requirements for Hazardous Use Units and Chicago Fire Code.
4. HPM rooms. Exhaust ventilation for HPM rooms shall comply with Section 18-28-502.7.1.1 and other applicable codes.
5 Gas cabinets. Exhaust ventilation for gas cabinets shall comply with Section 18-28-502.7.2. The gas cabinet ventilation system is allowed to connect to a workstation ventilation system. Exhaust ventilation for gas cabinets containing highly toxic or toxic gases shall also comply with Sections 18-28-502.8.7 and 18-28-502.8.8.
6. Exhausted enclosures. Exhaust ventilation for exhausted enclosures shall comply with Section 18-28-502.7.2. Exhaust ventilation for exhausted enclosures containing highly toxic or toxic gases shall also comply with Sections 18-28-502.8.7 and 18-28-502.8.8.
7. Gas rooms. Exhaust ventilation for gas rooms shall comply with Section 18-28-502.7.2. Exhaust ventilation for gas cabinets containing highly toxic or toxic gases shall also comply with Sections 18-28-502.8.7 and 18-28-502.8.8.
Motion picture projectors shall be exhausted in accordance with Section 18-28-502.10.1 or 18-28-502.10.2.
Projectors without an exhaust connection shall have contaminants exhausted through a mechanical exhaust system. The exhaust rate for electric arc projectors shall be a minimum of 200 cubic feet per minute (cfm) (0.09 m
3
/s) per lamp. The exhaust rate for xenon projectors shall be a minimum of 300 cfm (0.14 m
3
/s) per lamp. Xenon projector exhaust shall be at a rate such that the exterior temperature of the lamp housing does not exceed 130°F (54°C). The lamp and projection room exhaust systems, whether combined or independent, shall not be interconnected with any other exhaust or return system within the building.
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