Exhausted enclosures and gas cabinets for the indoor storage of silane gas in amounts exceeding the maximum allowable quantities per control area shall comply with this section.
1. Exhausted enclosures and gas cabinets shall be in accordance with Section 18-28-502.7.2.
2. The velocity of ventilation across unwelded fittings and connections on the piping system shall not be less than 200 feet per minute (1.02 m/s).
3. The average velocity at the face of the access ports or windows in the gas cabinet shall not be less than 200 feet per minute (1.02 m/s) with a minimum velocity of 150 feet per minute (0.76 m/s) at any point at the access port or window.